An Excimer Laser (EL) is one of the most powerful laser that operate in the ultraviolet spectral region known as Ultraviolet lasers and it also generates nanosecond pulses. The excimer gain medium is a gas mixture typically containing a noble gas such as argon, krypton or xenon and a halogen like a fluorine or chlorine, apart from helium and /or neon as buffer gas. Excimer laser is pumped with short current pulses in a high-voltage electric discharge which creates excimers, also known as excited dimers.

     Laser Center UTM has 2 units of Excimer lasers that are ArF (Argon Flouride) and KrF (Krypton Flouride) excimer lasers. ArF excimer laser has output wavelength of 193 nm while KrF excimer laser has output wavelength of 248 nm. ArF excimer lasers are routinely used in excimer laser lithography, Surface micromachining and pulse laser deposition technique. KrF excimer laser are used in dental treatment, production of soft X-rays from plasma and nuclear fusion energy research.

     For the information on the specifications of excimer lasers available in Laser Center UTM, Please click ArF excimer laser or KrF excimer laser.

      Please feel free to contact us at lasercenter@utm.my if you need any further information.